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CS330 Mass Flow Controller&Flow Meter
The CS330 product is a high-end digital product newly developed by Seven Star Huachuang Flow Meter, with a maximum flow rate of 200SLM nitrogen and th
Product details
advantage
A new form of metal sealing structure. This sealing structure has the advantages of reliable sealing, simple assembly process, and corrosion resistance, and is widely applicable for measuring various gas flow rates.
A sensor with small size, zero drift, and strong anti-interference ability. The sensor adopts an upstream and downstream symmetrical structure design, ensuring zero drift of the sensor; The sensor is equipped with insulation cotton inside, which greatly reduces the influence of environmental temperature on the sensor, thereby improving the anti-interference ability of the sensor and ensuring the accuracy of gas flow detection.
Advanced artificial intelligence robot surface polishing technology. The CS330 series products have a metal surface roughness of up to 0.1RA and are manufactured strictly in accordance with SEMI standards.
CS330 series products support dual power supply of ± 8V~± 16V or single power supply of+14V~+28V; Supports digital and analog input/output.
The CS330 series products support multiple electrical interfaces, including DB9, DB15, DeviceNet (side, top); Supports RS485 and DeviceNet communication methods.
Technical Parameter
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CS330C、D |
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model |
CS330C、D |
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Valve type |
normally closed |
not have |
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Flow specification (N2) |
(100,200) SLM |
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accuracy |
±1.0% S.P. (＞35% F.S.) ±0.35% F.S. (≤35% F.S.) |
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linear |
±0.5% F.S. |
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repeatability |
±0.2% F.S. |
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response time |
≤ 1 sec |
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Range of working pressure difference |
100 ~ 300 KPa （50＜F≤100SLM） |
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temperature coefficient |
Zero point: ≤ ±0.02% F.S./℃； During adjustment: ≤ ±0.1% F.S./℃ |
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MOPD |
1 MPa |
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pressure resistance |
3 MPa (435pisg) |
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Leakage rate |
5 x 10-12Pa·m3/ sec He （5 x 10-11atm.cc/sec He） |
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Sealing material |
metal |
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Ambient Temperature |
（0～50）℃ |
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Input signal |
Number: RS485 or DeviceNetTM |
not have |
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output signal |
Number: RS485 or DeviceNetTM |
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drift |
＜ 0.6% F.S./year without zero point correction |
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power supply |
± 8 to ± 16 VDC (bipolar) or+14 to+28VDC (unipolar) |
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surface chemical composition |
normal |
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Standard joint form |
VCR 1/2´´ |
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Form of power connector |
D-type 9-pin male connector; D-type 15 pin male connector; DeviceNet connector |
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weight |
2.6 Kg |
1.5 Kg |
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